Pioneering work in atomic-scale processing

Danish company ATLANT 3D found an ideal partner in Silicon Austria Labs (SAL) in its search for applications for its novel atomic-scale processing equipment. SAL has many years of experience in developing and manufacturing PZT MEMS micromirrors, which are used for projection purposes in the automotive industry, for example. The precise protective coating required for these mirrors can be applied using equipment such as that provided by ATLANT 3D.

As part of the EDIH Applied CPS project, the two partners developed a sophisticated methodology for optimally coating the mirrors using localised atomic layer deposition. Subsequent optical and scanning electron microscope examinations proved that the mirrors were fully functional and met the desired specifications after deposition.

Not only did ATLANT 3D benefit from cooperating with SAL through the new deposition algorithm, it also expanded its portfolio with new end applications and explored potential improvements to the technology. The advantages of Direct Atomic Layer Processing (DALP®) in this application would be avoiding an additional lithography process and coating a MEMS structure after release.  This will enable the Danish company to drive material innovations and access new markets more effectively in future.